Adaptive MOEMS applications in telemetry and multi-spectral imaging

Abstract

Micro-opto-electro-mechanical systems (MOEMS) are finding increased uses in instrumentation and many imaging applications. The required complex optical manipulations of laser beams use expensive, sub-optimal and inaccurate optical components (lenses, mirrors, spectral filters, etc.). MOEMS components can be introduced instead of (or in addition to) these optical path elements. Such MEMS devices can significantly improve the overall performance of these instruments. We propose MOEMS elements arrays to act as adaptive and corrective optics. Alternatively, the MOEMS elements can dynamically vary the optical path structure. Initial prototypes have been built. Sample applications are introduced. They span multi-spectral medical imaging and laser radar telemetry.