Abstract

In this paper, design and implementation of an adaptive feed-forward controller for micro/nano-positioning control of piezoelectric actuator (PEA) is described. Discrete-time Dahl hysteresis-based mathematical model of the PEA is developed and the values of the model parameters are estimated through an autoregressive with exogenous terms (ARX) model identification technique using experimental input–output data. A recursive least-square estimator (RLSE)-based adaptive feed-forward (FF) controller is proposed, which takes into account the parameter uncertainty. The FF controller has also been implemented in a DsPIC30F4011 microcontroller. The established PEA model and the controller are validated by simulation and experimental results including parameter variation.

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