Abstract

Temperature control technique has received much attention in the field of semiconductor thermal management. This paper presents a novel adaptive backstepping-based temperature control strategy for semiconductor refrigeration systems considering unmodeled dynamics. The inherent non-affine problem caused by the even-order input signal is solved by combining a novel smooth function into the command filtered backstepping method. And then, the adaptive observer is also employed to improve the system performance under unmodeled dynamic deviations. The stability of the closed-loop system is analyzed based on the Lyapunov theory, and simulation experiments are given to verify our control method. The simulation results show that the method can realize the accurate control of temperature under unmodeled dynamics. Under the disturbance of ambient temperature changes and model errors, the steady state error of the system remains below 0.1 °C. In comparison with the traditional control methods, our strategy has a stronger ability to suppress the uncertainty effects.

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