Abstract
A CMOS built-in current sensor is proposed which is suitable for very low power supply current monitoring and low power supply voltage mixed circuits. It takes advantage of the parasitic resistor attached to an interconnection layer. Analysis and simulations reveal that the transducer is accurate, linear, transparent, highly sensitive and versatile. Process dependencies are taken into account. The sensor was fabricated in 0.6 /spl mu/m technology and the characterising measurements are reported.
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