Abstract
为了满足两镜反射系统对光学元件高精度的装调、定位要求，以及系统工程化应用对可靠性与装调效率的要求，提出了一种基于人工神经网络（ANN）的自适应装调技术。基于矢量波像差理论分析两镜系统波像差与失调量的映射关系，在Keras框架下搭建ANN，并以非解析思路构建了自适应装调模型，开发了自适应装调装置，使失调次镜的平移调校精度优于2 μm，倾斜调校精度优于2″，解决了算法设计与精度优化、反射镜组微应力固联等技术难题，并对某双抛无焦系统完成了自适应装调验证。试验结果表明：运用该装调技术，两镜反射系统装调后波像差优于<i>λ</i>/16、装调周期大幅缩短、装配可靠性通过环境试验考核，为该技术的工程化应用打下了基础。
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
