Abstract
This paper reports our experience in developing a scheduling system for the semiconductor fabrication process, and extending the design applying an object oriented scheduling framework. First, we explain features of semiconductor fabrication processes, and scheduling methods including the one we have actually applied to a real fabrication line. We then introduce a production scheduling framework, which consists of three loosely coupled subsystems: a schedule model, a scheduling engine, and a graphical user interface. By elaborating the scheduling engine subsystem, we show how the framework can be adapted to the enhanced design of the fabrication line scheduler.
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