Abstract
The latest developments in the field of metrology and correction of high-ratio substrates for X-ray optics with a subnanometer scale accuracy, carried out at the Institute for Physics of Microstructures (IPM), Russian Academy of Sciences, are reported. A scheme of an interferometer with a diffracted reference wave, based on a single-mode fiber with a narrowed exit aperture, is reported. Some methods for shape correction are described.
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Schedule a callMore From: Bulletin of The Russian Academy of Sciences: Physics
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