Abstract
Beijing Synchrotron Radiation Facility (BSRF ) is a partly dedicated synchrotron radiation ( SR) source operated in either parasitic or dedicated mode. LIGA research at BSRF started from 1993 and focused in the first two steps of deep X-ray lithography and electroplating. Scanning exposure chamber of deep X-ray lithography was first built in 1996 on a 3W1 wiggler beamline with very hard X-ray and high X-ray density. We used the system for the research of LIGA deep X-ray lithography for many years, and found that the wiggler beamline does not meet the LIGA deep X-ray lithography for its disadvantages of small and bad uniform X-ray spot of 30mm on the wafer in horizontal and the very high X-ray power density on the wafer which causes the distortion of resist structures by the large heat load on the resist. In 2001 we used a bending magnet beamline (3B1) as deep X-ray lithography instead of wiggler beamline. The 3B1 beamline is divided to be 3B1B as LIGA deep X-ray lithography and 3B1A as nano X-ray lithography. The electroplating is used to make the mechanical parts and mold insert with nickel and copper materials for different applications.
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