Abstract
A new microprobe system is described which will provide easier operation, especially for outsider, users, a micro- and macro-PIXE facility, improved accuracy for quantitative analysis and an improved scanning system. The probe will have crossed slits as object, a magnetic quadrupole doublet lens and electrostatic deflector plates. Ion optical calculations were done up to third order, using the TRANSPORT and OXRAY computer programs. The image spot size is investigated as function of the geometrical arrangement. A collimation line has so far been built. The scattering at slit edges of the geometrical shape used in the old microprobe is compared with the scattering at the edges of the simpler cylindrical shape. The latter proved to be slightly superior.
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