Abstract
Deformation of the tool itself, due to cutting forces, is one of the major causes of machining error in precision machining. The authors propose a new solution to the problem that employs an actively controlled compliance device. By applying ‘negative’ compliance of the device, deformation of the machining tool can be compensated, and the machining error can be reduced to zero. This paper reports our analysis of the machining process to compensate machining error using negative compliance. It also evaluates our method through experiments of grinding silicon wafers and turbine blades.
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