Abstract
In recent years, many applications in precision engineering require a careful isolation of the instrument from the vibration sources by adopting active vibration isolation system to achieve a very low remaining vibration level especially for the very low frequency under 10Hz vibration signals. In this paper, based on the previous research experiences in the systematical modeling and study of parallel robots, a hybrid robot is described and the vibration model is given by using Lagrange's equations. Then the present study addresses the issues related to the active vibration control schemes for the MIMO system using LQR algorithm. Finally, numerical simulations on the effect of active vibration control are presented.
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