Abstract
In this study, we apply digital control to a micro-vibration isolation system using both air springs and magnetic bearings. We design two isolation control systems : a disturbance cancellation control system consisting of both the feedback and the feedforward control loops, and an H∞ control system designed by applying the solution of the H∞ 4 block problem. We first compare the two isolation systems through by means of simulation. The calculated results show that both systems can achieve excellent isolation performance. Also it is known that the disturbance cancellation effect can be accomplished by H∞ control, and the H∞ control system is stable against variations of the loading weight on the isolation table. Moreover, experiments using DSP (digital signal processor) are performed on the actual isolation system. The experimental results are almost the same as the simulated ones, and the effectiveness of H∞ control is confirmed.
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