Abstract
We have demonstrated the pulse poling technique to activate the piezoelectric property of PZT thin films within 1 second. We have fabricated piezoelectric microcantilevers with Si proof mass using Pb(Zr0.52,Ti0.48)O3 (MPB-PZT) thin films. By applying 1 kHz and 100 V of unipolar triangle pulse voltage, the positive piezoelectric constant |d31| of PZT thin film has been enhanced as high as 95 pm/V, which is larger than dc poled PZT thin films (67 pm/V).
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
