Abstract
An overview will be presented of the current state of commercial MEMS microphone technology with focus on acoustic performance metrics such as noise and sound pressure limits, bandwidth, and low frequency behavior. Important limitations for MEMS element and electronic performance will be discussed in the context of the various transducer technologies currently being pursued or offered. The performance of MEMS microphones, since their commercial introduction in the early 2000s, has been strongly driven by the mobile phone handset application, which continues to be the most important market segment by volume. Substantial improvements in performance have been realized since the inception, to meet opposing demands of better acoustic performance and lower power consumption/smaller size. A brief summary of the development trajectory and possible future directions will be given. With the advent of new important applications, such as home automation, and a general movement in design towards digital interfaces, other blends of microphone performance requirements are emerging. A discussion of such requirements and their possible impact on acoustic MEMS design will be provided.
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