Abstract
Aluminum-nitride films have been deposited on various substrate utilizing a modified sputter gun. It provides electrical isolation between the source and the substrate allowing the use of high power density without subjecting the substrates to electron bombardment. Any electron leakage on the axis is trapped by additional magnetic field. pletely free f rom electron bombardment. A very strong magnetic field makes it possible to sputter below lm Torr. This high vacuum sputtering improves x-ray (002)-peak intensity, surface smoothness, film color, transparency, and deposition rate. The deposition rate of the sputter gun is as high as 2.4 m/hr at input power of 300 W. This report will focus on the quality of acoustic and optical properties. The insertion loss of the A1N film (h/h = 0.35) on Corning 0211 glass is 39 dB at frequency of 193.4 MHz. The center to center propagation distance is 10 mm. The design parameters of the interdigital transducer are as follows: finger pair 12, wavelength 23.3 ilm, aperture 1.0 mm. The growing A1N film is com
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