Abstract
An acoustic emission (AE) activity during implantation of H + ions in crystalline LiNbO 3 is studied using the method of instant spectrum analysis. The observations support the idea that the continuous AE signals in the sound — and infrasound — frequency range are caused by the local and random macro-strain and macro-deformations formed by penetrating ions. A generalised integrated characteristic-relative integrated intensity of AE is proposed to obtain information about the physical state of the implanted subsurface layer.
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