Abstract
Photochemical reactions of the thymine containing polymers were studied and were applied as Deep-UV photoresists materials, which gave high resolution pattern of 0.3mμ.1 Pyrimidine polymers can also be applied as chemical amplification resists for microlithography. One of the pyrimidine polymers is a polycarbonate containing both thymine photodimer and tertialy alcohol units in the polymer main chain. Another polymer is a polyether containing acid sensitive alkoxypyrimidine units in the main chain. This paper deals with preparation of the acid sensitive polymer containing pyrimidine units, and with photosensitive acid catalytic reactions.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.