Abstract

Ag2Se-based thermoelectric materials are attracting great attention because of their potential in fabricating high-performance miniature and wearable electronics. Here, an advanced thermal co-evaporation method is employed to fabricate high-performance Ag2Se thin films with controllable compositions. The atomic ratio Ag/Se of 2.06 can tune the carrier concentration to 1.4 × 1019 cm−3, leading to a power factor of 6.27 μW cm−1K2 at room temperature. As well, an annealing process further improves the electrical transport properties by increasing the carrier mobility while maintaining the carrier concentration. Microstructure analysis indicates that annealing can reduce dislocation defect density and Ag vacancy concentration, contributing to a high Seebeck coefficient, finally resulting in a high power factor of 20.51 μWcm−1K−2 at 393 K. Moreover, a thermoelectric device composed of 18 legs is fabricated by using the optimized Ag2Se thin film, which presents a maximum output voltage and power of ∼1.7 mV and ∼22 nW at the temperature difference of 50 K. These results demonstrate that a combination of compositional optimization and annealing condition manipulation is effective to boost the thermoelectric performance of Ag2Se thin films, showing great potentials in applying for wearable electronics.

Highlights

  • Thermoelectric (TE) materials can utilize Seebeck effect to generate energy from the conversion between heat and electricity [1,2,3,4,5]

  • A record-high power factor of 20.51 μWcm1K-2 at 393 K is achieved, which is the best result of the Ag2Se thin film prepared by evaporation method

  • Various methods in recent years have been employed to fabricated Ag2Se thin films in order to achieve high TE performance and mechanical properties thin film to meet the demand of device manufacturing [17,18,19,20,21,22]

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Summary

Introduction

Thermoelectric (TE) materials can utilize Seebeck effect to generate energy from the conversion between heat and electricity [1,2,3,4,5]. The carrier mobility increased while carrier concentration is maintained after performing an annealing process, contributes to relatively high Seebeck coefficient and decent electrical conductivity for Ag2.05Se film annealed at 423 K. A record-high power factor of 20.51 μWcm1K-2 at 393 K is achieved, which is the best result of the Ag2Se thin film prepared by evaporation method.

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