Achieving Full Forward Flow of Valveless Piezoelectric Micropump Used for Micro Analysis System

Abstract

The valveless piezoelectric micropump has the advantages of simple structure, high precision and low cost, which can realize the directional transport of micro-fluid and wildly be applied in a micro analysis system. However, backflow at the outlet cannot be avoided due to the limitation of its working mechanism. Large reflux rate can increase the volume control accuracy per cycle, but reduces the stability of the micro analysis system. In order to achieve a full forward flow, which reduce the influence of backflow on the system’s stability, the reflux characteristics of the designed valveless piezoelectric micropump were studied. The condition proposed, which should be satisfied for obtaining full forward flow, is that the reflux rate should be less than 50%. The influence of relations between the size of the key structures and pumping characteristics are established, and the references for structural parameter selection to reduce backflow and achieve full forward flow are given. This paper highlights the methods of controlling the pumping performance and achieving full forward flow, based on structural parameter selection analysis and adjusting excitation. The reflux rate can be reduced to 5% when the inlet angle is increased to 9°. The experimental results verify the validity of the obtained results and the proposed methods of control. This work provides important references for applying valveless piezoelectric micropumps in micro analysis and precision-driven systems.