Abstract
Present IC complexity and the evolution of the technological design rules have enhanced the request of new techniques to evaluate the real behaviour of VLSI circuits. E-beam based techniques have shown to be a winning approach to analyse the internal electrical and logical status of the circuit. The Scanning Electron beam Microscope can be really indispensable in IC debugging procedures if it is deeply integrated with the design environment. The ESPRIT Project 271 ADVICE 1 aimed to automate the electron beam tester, creating a link toward the design data. The foreground of the project is going to be a commercial product. Furthermore the basis for new developments have been established.
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