Abstract

Controlled integration of metallic nanoparticles (NPs) onto photonic nanostructures enables the realization of complex devices for extreme light confinement and enhanced light-matter interaction. For instance, such NPs could be massively integrated on metal plates to build nanoparticle-on-mirror (NPoM) nanocavities or photonic integrated waveguides (WGs) to build WG-driven nanoantennas. However, metallic NPs are usually deposited via drop-casting, which prevents their accurate positioning. Here, we present a methodology for precise transfer and positioning of individual NPs onto different photonic nanostructures. Our method is based on soft lithography printing that employs elastomeric stamp-assisted transfer of individual NPs onto a single nanostructure. It can also parallel imprint many individual NPs with high throughput and accuracy in a single step. Raman spectroscopy confirms enhanced light-matter interactions in the resulting NPoM-based nanophotonic devices. Our method mixes top-down and bottom-up nanofabrication techniques and shows the potential of building complex photonic nanodevices for multiple applications ranging from enhanced sensing and spectroscopy to signal processing.

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