Accurate shape measurement of focusing microstructures in Fourier digital holographic microscopy.

Abstract

This paper proposes a measurement method of focusing objects with a high gradient shape of a small and large radius of curvature. The measurements are carried out on a Fourier digital holographic microscope with optimized illumination conditions maximizing the usage of the system's numerical aperture. The obtained fringe patterns are the result of interference of deformed spherical object and spherical reference waves. The key elements of the method are the aberration compensation and calibration procedures. They provide accurate reconstruction of the object wave and determination of the focus position of the sample. The shape is calculated in two steps. First, the object wave is reconstructed at the plane of the object focus using single or multiframe phase extraction algorithm and the specialized propagation method. The step includes compensation for spherical aberration. In the second step, the sample shape is computed with the local ray approximation approach. The proposed method is experimentally validated with measurements of challenging, high gradient shapes (convex, concave) of different radiuses of curvature.