Abstract
his paper presents a pneumatic servo system for trajectory tracking. To reduce the effects of friction force, seals are removed from the pneumatic actuator, and the slider of the actuator is mounted with externally pressurised air bearings. Previous studies of this pneumatic actuator show an accuracy of ±2 [μm] for step responses and low constant velocities control tests. In this paper, the pneumatic servo system is tested in the more demanding task of trajectory tracking. Considering the characteristics of the pneumatic servo system, it is clarified that the trajectory with constant jerk is better than trajectory with constant acceleration. An example for a displacement of 180 [mm] that is realised in 0.4 [s] is shown. Despite the slider reaches a high velocity of 0.8 [m/s], an accuracy of±50 [μm] is attained.
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