Abstract
The precise control method plays a crucial role in improving the accuracy and efficiency of the micromanipulation of optically induced dielectrophoresis (ODEP). However, the unmeasurable nature of the ODEP force is a great challenge for the precise automatic manipulation of ODEP. Here, we propose a data-driven kinematic model to build an automatic control system for the precise manipulation of ODEP. The kinematic model is established by collecting the input displacement of the optical pattern and the output displacements of the manipulated object. Then, the control system based on the model was designed, and its feasibility and control precise were validated by numerical simulations and actual experiments on microsphere manipulation. In addition, the applications of ODEP manipulation in two typical scenarios further demonstrated the feasibility of the designed control system. This work proposes a new method to realize the precise manipulation of ODEP technology by establishing a kinematic model and a control system for micromanipulation, and it also provides a general approach for the improvement of the manipulation accuracy of other optoelectronic tweezers.
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