Abstract
AbstractAn improved integration approach for segmented 3D shapes using projected digitalized 2D pattern is presented. The digital 2D patterns are fabricated based on lithography techniques. Geometrical accuracy better than 0.5 μm can be achieved. Contrast ratio of the fringe pattern can be precisely controlled as well. With this pattern, integrated accuracy better than one part in one hundredth of the pixel size can be achieved. © 2008 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 2474–2480, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.23667
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