Abstract
Two methods for obtaining thin target PIXE K α calibration factors were compared. The first (relative or experimental) method relied on two different sets of accurate thin film standards, while the second (absolute or theoretical) method involved the use of fundamental physical parameters and an experimental investigation of the Si(Li) detector's detection efficiency. Several critical facets of the calibration procedures are discussed or were carefully investigated. These include the incident beam energy determination, beam current integration, accuracy of thin film standards, solid angle and window thicknesses (Be, Au, Si) of the Si(Li) detector, net K α peak area determination and tail-to-peak ratio as a function of X-ray energy, fluorescence yields and ionization cross sections. The experimental and theoretical calibration factors finally obtained showed excellent agreement, the average difference being only ∼3.5%.
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