Accurate and Efficient Self-Calibration Algorithm of Broadband On-Wafer Scattering-Parameter Measurements for Production Test Applications Up to 110 GHz

Abstract

This paper presents an accurate and efficient on-wafer calibration algorithm of broadband scattering-parameter measurements for radio-frequency integrated circuit production test applications. Three on-chip calibration standards with the same probe positions as those of the devices under test (DUTs) were designed to take advantage of fixed probe heads in the x–y directions during calibration and measurements. In addition, three on-chip standards—a series resistor and a shunt resistor (both of which have an offset line segment) as well as a transmission line (TL)—do not have to be characterized in advance, and the measurement reference impedance can be acquired further though self-calibration without an impedance-standard substrate (ISS). Simulation studies and experimental confirmation were conducted on GaAs substrates, from 2 to 110 GHz, in addition to comparisons of the multiline thru-reflect-line (TRL) calibration results.