Abstract
The principle of 3-D reconstrution for SEM image is not so conplex, ie. the SEM image of polar project is treated with a rectangular coordinate, however, it accuracy is an attractatble topic. The accuracy of a stereopair is effected by following factors:(1) Sample’s position:Image’s field depth of SEM is determined bywhere, F4: the depth of fieldD0: resolution of imageβ : condence angle of E-beam (about 1 × 10−3 rad.)when the magnificaton is 1000 times, ie. Do = 0.1μm, then Ff = 100μm. To get an accurate stereopair, one should keep the interested points on the specimen in the same field depth before and after tilting operation. During the operation, a point displacement is sketched in Fig.1, where 0 is tilting axis. Ao is the original position of A, A, is tilted one, α is tilted angle and β is the angle betweem 0Ao and Z axis. After the tilt, the perpendicular displacement of A point isand the horizontal one isGenerally, the magnification is 1000X, ie. Ff=100μm, α≈10°, if β<=30° then, 0Ao<=700μm is the condition for that ZA < = 100 m.
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