Abstract
The spot size has been measured by chopping the beam spot with a knife edge on an optical disk. Tangential and radial spot sizes are measured with different two angled knife edges: θ1-edge and θ2-edge. In this paper, the errors in the measurement of spot sizes caused by the error in the scanning angle and the scanning velocity are described. The result of the theoretical analysis gives the best combinations of the scanning angles which are θ1=0°, θ2=±45° with the radial direction. For example, if the angle error of θ1 and θ2 obtained experimentally 0.64°, then the calculated error of the radial spot size is 2.2%. The analyzed error shows a good agreement with the experimental results. It was analytically observed that the influence of the scanning velocity error on the error of the measured spot sizes can be practically ignored using this method.
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