Abstract

The use of sparse particle-in-cell (PIC) algorithms to accelerate the standard explicit PIC scheme has recently been successfully applied in the context of single-frequency capacitively coupled plasma discharges [Garrigues et al., J. Appl. Phys. 129, 153303 (2021)]. We have extended the sparse PIC scheme to model dual-frequency capacitive discharges. Comparisons between standard and sparse PIC algorithms show that the plasma properties as well as the electron and ion distribution functions can be retrieved with a maximum error of 2%. This work opens the interest of using the sparse PIC algorithm to perform 2D and 3D simulations under real operating conditions of capacitively coupled plasma discharges.

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