Abstract
Yttria-stabilized zirconia (YSZ) films were prepared by a laser Chemical vapor deposition (CVD) process. A plasma-like strong light emission was observed from a reaction zone around a substrate by laser irradiation. The deposition rates were significantly increased from 1 to 230 µm/h. The charges in the light-emitting zone consisted of mainly positive and negative ions, but electrons scarcely existed. The emitted light had a continuous spectrum similar to the Planck distribution.
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