Abstract
Stability under acceleration loading is a major limiting factor in the design of high precision Surface Acoustic Wave (SAW) resonators. SAW resonators are, generally, fabricated on the surface of quartz plates in order to obtain temperature compensated frequency output. However, because quartz is highly anisotropic, previous studies have been limited to a few plate geometries, ST-cut quartz and simple mounts. This paper describes a new analysis of acceleration induced frequency shifts in SAW resonators fabricated on quartz plates. Several different crystalline orientations and several different supports are considered. There is good agreement between predicted and measured values for the acceleration sensitivity on ST-cut quartz plates. We also clarify the strong dependence of the acceleration sensitivity on seemingly very small changes in the mounting supports of the SAW substrate.
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