Abstract
Traditional reliability analysis of MEMS devices is based on only one failure mode, but paroxysmal failure and degradation failure are simultaneous on one MEMS device which is called as competing failure modes. Accelerated degradation modeling and parameter estimation based on competing failure modes are elementary contents of reliability analysis, in which paroxysmal failure and degradation failure are integrated in the process of educing reliability function, and elementary theories of reliability and statistics are used. The method of accelerated degradation modeling and parameter estimation is proved to be precise in a simulation of accelerated life test on a kind of MEMS device which have the two failure modes: paroxysmal failure and degradation failure, and they are have relations with stress variable: current.
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