Abstract
This paper presents the first accurate AC impedance extraction methodology for the evaluation of high-frequency behavior of graphene nanoribbon (GNR) structures targeted for interconnect and inductor applications. To overcome the simplifying assumptions of Ohm's law that is invalid for high-frequency analysis of GNRs and to take into account the electric field variation within a mean free path, the current density is derived starting from the basic Boltzmann equation and combining the unique E-k dispersion relation and the concept of two equivalent valleys in the Brillouin zone of graphene. This is followed by self-consistent numerical calculation of electric field with Green's function approach using the concept of vector potentials. Using the developed method the intricate high-frequency effects in GNR such as Anomalous Skin Effect (ASE), high-frequency resistance and inductance saturation, intercoupled relation between edge specularity and ASE and the influence of linear dimensions on impedance are investigated in details for the first time.
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