Abstract
Radiofrequency modulation has been applied in an ion plating process for an insulator material. Alumina was evaporated from a 270° bent electron beam source. Heat dissipation at the substrate surface with respect to deposition rate and rf power input was measured by a calorimetric method. Films deposited at various conditions of substrate temperature and rf power were assessed. The effect of rf modulation was observed on appearance of films formed at low temperatures (220°C) and on fractured sections at high temperatures (410°C). For films formed at 280°, 360°, and 410°C on either steel or molybdenum sheets, no differences in pin hole, adhesion, and film composition can be detected due to the effect of rf modulation.
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