Abstract

A screen that absorbs electromagnetic radiation has been proposed, a micromachine technology for its production has been developed based on volumetric microprocessing of single-crystalline silicon,experimental samples have been manufactured, and their characteristics have been studied. It is shown that in the measurement frequency range of 14.7–26.7 GHz there is a smooth increase in the attenuation introduced by the absorbing screen with increasing frequency to a maximum value of 20–23 dB at a frequency of about 20 GHz, and then a smooth decline. The amount of attenuation increases as the length of the screen increases and can reach any value. The manufactured samples of the absorbing screen provide significant attenuation in the required frequency range with a small substrate thickness and can be successfully used in space equipment to ensure electromagnetic compatibility.

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