Abstract
BackgroundAbsolute test is one of the most important and efficient techniques to saperate the reference surface which usually limits the accuracy of test results.MethodFor the position error correction in absolute interferometry tests based on rotational and translational shears, the estimation algorithm adopts least-squares technique to eliminate azimuthal errors caused by rotation inaccuracy and the errors of angular orders are compensated with the help of Zernike polynomials fitting by an additional rotation measurement with a suitable selection of rotation angles.ResultsExperimental results show that the corrected results with azimuthal errors are very close to those with no errors, compared to the results before correction.ConclusionsIt can be seen clearly that the testing errors caused by rotation inaccuracy and alignment errors of the measurements can be consequently eliminated from the differences in measurement results by the proposed method.
Highlights
Absolute test is one of the most important and efficient techniques to saperate the reference surface which usually limits the accuracy of test results
The classic multi-angle averaging method proposed by Evans and Kestner, measures the spherical surface at N angular positions spaced with respect to the optical axis and the resulting wavefronts are averaged, errors in the rotated member with angular orders that are not integer multiples of the number of positions will be removed without Zernike fitting [10, 11]
We present a method to determine the true azimuthal positions of part rotation and eliminate testing errors caused by rotation inaccuracy
Summary
Absolute test is one of the most important and efficient techniques to saperate the reference surface which usually limits the accuracy of test results. The shift-rotation methods without the testing of cat’s-eye position have been developed to test spherical and flat surfaces [4–9]. These approaches yield an estimate for the test surface errors without changing experimental settings, such as cavity length, that may affect the apparent reference errors. The classic multi-angle averaging method proposed by Evans and Kestner, measures the spherical surface at N angular positions spaced with respect to the optical axis and the resulting wavefronts are averaged, errors in the rotated member with angular orders that are not integer multiples of the number of positions will be removed without Zernike fitting [10, 11]
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