Abstract
Fabry-Perot interferometry is a powerful technique for the measurement of extremely small displacements. We have developed a Fabry-Perot interferometer for the calibration of displacement sensors with nanometer accuracy, in order to provide direct traceability of such sensors to the primary standard of length. In conclusion, the Fabry-Perot interferometer provides the possibility to calibrate nanosensors. like capacitive and inductive sensors, with nm accuracy.
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