Abstract
Absolute line profiles of three silicon plane mirrors were measured by the three-flat method using a near-infrared interferometer. The interferometer was constructed using a near-infrared laser diode with 1310 nm wavelength light, to which the silicon plane mirror is transparent. The maximum height difference in the absolute line profiles is less than 8.9 nm and the rms value of height difference is less than 2.0 nm for a measured line of 12.7 mm. The near-infrared interferometer is useful for measuring a set of line profiles at the height difference level to calculate the absolute flatness of silicon plane mirrors.
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