Abstract
We describe a variation of the liquid-flat technique fordetermining the absolute flatness of a 240-mm-diameter optical surfaceto an accuracy better than 1/100lambda in both its horizontal(three-point support) and vertical orientations. Using theappropriate mathematics to calculate the surface deformation of a diskdue to gravity, we achieved verification of the method by comparingmeasurements carried out on a pair of optical flats and a liquidreference surface.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.