Absolute distance measurement using laser interferometric wavelength leverage with a dynamic-sideband-locked synthetic wavelength generation.

Abstract

Absolute distance measurement with laser interferometry has the advantages of high precision and traceability to the definition of meter but its accuracy is primarily limited by the phase demodulation. Among kinds of absolute distance interferometric measurements, the multi-wavelength interferometry is widely used but seriously limited by the generation of suitable synthetic wavelength and the stability of adopted synthetic wavelength. Inspired by the mechanical lever, we hereby establish a principle of laser interferometric wavelength leverage (LIWL) for absolute distance measurement. By keeping the phase difference in two single wavelengths constant, LIWL achieves the measurement of large distance with respect to synthetic wavelengths by detecting nanometer displacement with respect to a single wavelength. The merit of LIWL is eliminating the influence of phase demodulation error. And a dynamic-sideband locking method based on a high-frequency electro-optic modulator is proposed, which can flexibly and quickly generate variable synthetic wavelengths from tens of kilometer to millimeter with high stability. Experimental setup was constructed and absolute distance measurements were performed. Experimental results show that a measurement range of 100 m with residual error of less than 15 µm has been achieved by comparing the LIWL system and an incremental laser interferometer.