Abstract
Possibilities of using recently-developed femtosecond pulse lasers for advanced precision length metrology are investigated. Special emphasis is placed on the use of femtosecond lasers particularly for absolute distance measurements with sub-micrometer accuracy over extensive ranges. This investigation reveals that femtosecond lasers are capable of providing a suitable means of nanometrology by implementing dispersive comb interferometry in combination with synthetic wavelength interferometry and heterodyne interferometry.
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