Abstract
A novel cylindrical mirror analyzer (CMA) has been developed to obtain standard spectra in Auger electron spectroscopy. We obtained Auger electron spectra of gold, nickel, and soot (carbon). For gold, the details of the spectra are shown and the possible Auger transitions are identified for the whole range of energy by subtracting a background of assumed simple polynomial function. The total range spectra of nickel and soot are reported for the primary accelerating voltages ranging 1-5000V. In other words, the spectra of true secondary electron, Auger electron, loss electrons which excited shell electron and plasmon, and elastically backscattered primary electron are shown. It is found that the carbon (soot) as evacuated always presents clean surface without any ion sputtering treatment and the surface is quite stable.
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