Abrasive water and slurry jet micro-machining techniques for fabrication of molds containing raised free-standing micro-features

Abstract

The demand for metallic micro-molds that can be used for inexpensive mass production of polymeric microfluidic chips is increasing. Existing manufacturing techniques such as soft-lithography and photolithography can require multiple time-consuming steps, especially when the aim is to create three-dimensional features. In this study, the feasibility of using abrasive water jet machining (AWJM) and abrasive slurry jet machining (ASJM) to fabricate such micro-molds in Al6061-T6 and SS316 was studied. Jet raster scans under various combinations of process parameters were used in order to machine micro-pockets containing free-standing structures, representing molds for casting microfluidic chips with channel networks. As expected, for both materials and using both ASJM and AWJM, the pocket roughness decreased as the distance between adjacent raster scans (step size) decreased, but the lowest waviness occurred at an intermediate step size. The best quality pockets were achieved on SS316 using ASJM with the intermediate step size and the highest possible slurry mass flow rate. Unmasked machining could not be used to fabricate molds with sharp-edged intersecting features, and a novel hybrid AWJM/ASJM masked machining technique was thus introduced. An undercut and an undesirable erosion near the edges of the mask formed if the position of the last raster scan closest to the mask was not carefully controlled. Possible reasons for these phenomena were discussed in terms of the likelihood of jet deflection off the machining kerf and mask, and the resulting erosion due to secondary slurry flow. By careful selection of the process parameters, it was demonstrated that high quality molds with both single and intersecting free-standing structures at multiple heights could be fabricated, thus making three-dimensional microfluidic chip mold fabrication feasible.