Abstract
Introduction. X-ray methods are currently widely used in manufacturing of various products and components of the electronics industry, including micro- and nano-electronics. One of the most informative and illustrative methods is projection X-ray microscopy. Specialized X-ray systems for process control are developed and used in industry. The key element in the design of an X-ray inspection system is an X-ray tube. In the overwhelming majority of cases, X-ray inspection systems are based on collapsible microfocus x-ray tubes with constant pumping. This greatly complicates the design of the installation, increases its dimensions, weight and cost. Objective. Analysis of possible technical and technological solutions that improve the availability of the X-ray system for monitoring of electronic components while maintaining the information content of the control. Materials and methods. The article presents the results of analytical studies of assessment of the degree of influence of the main parameters of the X-ray tube – the size of the focal spot and the focal length – on the resolution of the resulting X-ray images. The advantages and disadvantages of two variants of the construction of the X-ray inspection systems are described: based on collapsible and based on sealed X-ray tubes. The dependence of the size of the focal spot on the voltage on the X-ray tube and on the power supplied by the electron beam to the target of the X-ray tube is analyzed. It is shown that sealed (from a vacuum pumping system) micro focus X-ray tubes can be successfully used as a radiation source in installations for X-ray inspection. It is concluded that in most cases, sealed tubes are more practical. Results. In solving of most problems of non-destructive testing of electronic components in the composition of the Xray system, X-ray sources based on sealed X-ray tubes can be successfully used. Due to this, dimensions, weight, and the cost of an X-ray system for monitoring of electronic components are substantially reduced. Conclusion. Sealed X-ray tubes are an effective alternative in the development of an X-ray system for monitoring of electronic components, which enables to fundamentally increase the availability of such a system.
Highlights
X-ray methods are currently widely used in manufacturing of various products and components of the electronics industry, including micro- and nano-electronics
In the overwhelming majority of cases, X-ray inspection systems are based on collapsible microfocus x-ray tubes with constant pumping
Analysis of possible technical and technological solutions that improve the availability of the X-ray system for monitoring of electronic components while maintaining the information content of the control
Summary
2. Внешний вид одного из вариантов конструктивного исполнения СРК электронных компонентов. В зарубежных рентгеновских системах применяются рентгеновские трубки трех разновидностей: открытые с прострельным анодом и закрытые двух модификаций с массивным и прострельным анодами. В России подобные рентгеновские системы серийно не выпускаются, хотя рентгеновские трубки, позволяющие разрабатывать обсуждаемые конструкции, разработаны. 4 представлен внешний вид отпаянной микрофокусной рентгеновской трубки БС-16 (III) семейства БС [2] (а) и ее конструкция (б). Трубка рассчитана на напряжение 150 кВ, имеет полый вынесенный анод и мишень прострельного типа, расположенную на торце длинной анодной трубы. Главные параметры трубок для СРК – это размер фокусного пятна f, минимальное фокусное расстояние l или расстояние, на котором объект может быть расположен от фокусного пятна
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of the Russian Universities. Radioelectronics
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
