Abstract
Since micro products have become smaller, the requirements concerning precision and accuracy for producing machine tools to manufacture such small parts increased. Consequently, each component of a machine tool needs to conform to these requirements. A flexure-based feed unit, a clamping system and mechanical couplings are briefly presented. These components can quickly be reconfigured, which allows for a new modular micro machine tool system. Each component incorporates individual precision and accuracy leading to an overall error budget for a machine tool system. This is methodically addressed in the contribution.
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