Abstract

An appropriate form for the expansion of an aberration function for an optical system of high numerical aperture is considered. The effects on the defocus signal of a confocal imaging system of aberrations, high aperture, finite Fresnel number, system configuration, and surface tilt are discussed.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.