Abstract
Further development of low voltage electron microscopy leads to an aberration correction of the device in order to improve its spatial resolution. The integration of a corrector to a desktop transmission electron microscope with exclusively low-voltage design seems to be a challenging task. The benefits and potential of the Rose hexapole corrector implemented to such a system are critically considered in this paper. The feasibility of miniaturized corrector suitable for desktop LVEM is especially discussed, including the aspect of corrector contribution to chromatic aberration that appears to be crucial. Optimal corrector parameters and resolution limits of such a system are proposed.•Improved spatial resolution•Spherical aberration correction•Permanent magnet transfer lenses
Highlights
In contrast to advanced light-optical microscopy techniques capable of resolution beyond the diffraction limit, which is considered the physical limit for classical microscopy, electron microscopy has not yet approached this physical limitation
Our goal is to investigate of the possible implementation of a compact corrector to the existing Delong Low voltage transmission electron microscopy (LVEM) desktop microscope with an exclusively low-voltage design
A hexapole corrector has been chosen due to its lower complexity, which is important for miniaturization for the desktop LVEM
Summary
In contrast to advanced light-optical microscopy techniques capable of resolution beyond the diffraction limit, which is considered the physical limit for classical microscopy, electron microscopy has not yet approached this physical limitation. Uncorrected conventional electron microscopy limited mainly by chromatic and spherical aberration is not able to achieve spatial resolution better than 50l [1]. There are two combinable approaches to resolve smaller objects: reduction of the De Broglie wavelength and correction of aberrations. L itself is small enough even for low accelerating voltage, its reduction has a significant influence on system aberration. On the contrary, increasing accelerating voltage has high requirements for technical parameters of electronics, as well as dimensions of main microscope column and sample stability against radiation damage. The appropriate way to exploit the physical potential of the instruments is to correct the most serious aberrations
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