Abstract
A micro flow meter for measuring small liquid flow rate is fabricated by using 3-D microstereolithography. The flow meter consists of an impeller, 500μm in radius, and a casing. The micro system is installed in a PDMS square channel, 500μm in width, through which the liquid to be measured flows. The flow rate is measured by counting the rate of rotations of the impeller. The flow characteristics are studied by visualization and measurement based on PIV technique. It is shown that there is a good linearity between the flow rate and the rate of rotations counted in the range of 5000-25000μL/min. The dynamic response of the present flow meter is evaluated to be about 0.25s, which is short enough to make measurement of unsteady flows. Time-averaged velocity distribution inside the micro flow meter is obtained.
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