A02 電極パターニングを用いたスマートフィルムセンサ・アクチュエータ(OS5 スマート構造システム)

Abstract

This paper deals with smart film sensors and actuators used with electrode patterning films. Almost all conventional distributed parameter sensors and actuators, PVDF film have to be shaped and attached on the substrate. To overcome handling ability and radical thickness, electrode patterning PVDF film using photoresist technique applies to distributed parameter modal sensor and actuator. First, this paper overviews the design process for modal filtering method and modal actuating method using two-dimensionally distributed modal sensor and actuator. And manufacture method for high-definition electrode patterning PVDF film is proposed. Furthermore, sensibility of the proposed films are experimentally measured in the case of one-dimensional structure. Then, efficient vibration-mode filtering and actuating used with electrode patterning film and effectiveness of proposed method are demonstrated by experimental results.